The films we make show a remarkable corrugation, as you can see in the images below.
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The characteristic dimension of this "window" through the substrate is roughly 2 mm square. The thin oxide-silicon-oxide layer is less than a micron thick. It is also very wavy, for reasons we do not currently understand. |
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This one is from the same chip as the one above, but is decidely less wavy, although still far from flat. |
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Sometimes the windows shatter, leaving behind a small portion of the layer at the edge. Although this "should" relieve stress in the layer, we nonetheless observe a waviness in the remaining layer. |
This page was last built on Wed, Jan 21, 1998 by Peter N. Saeta.
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