The films we make show a remarkable corrugation, as you can see in the images below.
|The characteristic dimension of this "window" through the substrate is roughly 2 mm square. The thin oxide-silicon-oxide layer is less than a micron thick. It is also very wavy, for reasons we do not currently understand.|
|This one is from the same chip as the one above, but is decidely less wavy, although still far from flat.|
|Sometimes the windows shatter, leaving behind a small portion of the layer at the edge. Although this "should" relieve stress in the layer, we nonetheless observe a waviness in the remaining layer.|
This page was last built on Wed, Jan 21, 1998 by Peter N. Saeta.