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Free-Standing Silicon Films

The films we make show a remarkable corrugation, as you can see in the images below.

970731.b4 picture The characteristic dimension of this "window" through the substrate is roughly 2 mm square. The thin oxide-silicon-oxide layer is less than a micron thick. It is also very wavy, for reasons we do not currently understand.
970731.b1 picture This one is from the same chip as the one above, but is decidely less wavy, although still far from flat.
edge picture Sometimes the windows shatter, leaving behind a small portion of the layer at the edge. Although this "should" relieve stress in the layer, we nonetheless observe a waviness in the remaining layer.

frontierLogo picture This page was last built on Wed, Jan 21, 1998 by Peter N. Saeta.